Desenvolvimento de um energy harvester MEMS piezoelétrico para sensores sem fio

Development of piezoelectric MEMS energy harvester for wireless sensors

Miron, Guilherme C. Engenharia Mecânica, Universidade Federal de Santa Catarina, Florianópolis, SC, Brasil, gcm.miron@gmail.com

Braga, Danilo Dynamox, Florianópolis, SC, Brasil, danilo@dynamox.net

Cordioli, Julio A. Engenharia Mecânica, Universidade Federal de Santa Catarina, Florianópolis, SC, julio.cordioli@ufsc.br

Resumo

O Monitoramento Baseado em Condição (CBM) via análise de vibração é um dos principais métodos preditivos utilizados na manutenção industrial ao longo da ultimas décadas. Atualmente, o sensoriamento utilizado neste tipo de análise tem evoluído para os sensores sem fio, os quais permitem medições continua e de equipamentos que antes eram considerados inacessíveis para sensores cabeados. Contudo, uma grande limitação para estas tecnologias é a vida útil da bateria que é reduzida sobre condições de temperaturas extrema, volume dados monitorados e processados e frequência de uso. Este trabalho apresenta o desenvolvimento de um Energy Harvester (EH) piezoelétrico adaptado para sensores de monitoramento de vibração. Diferentes projetos são investigados e um EH piezoelétrico MEMS é selecionado, modelado e otimizado, usando um algoritmo de evolução diferencial, seguindo diferentes funções objetivo com restrições impostas pelo processo batch multiusuário usado para fabricar os protótipos. A otimização visa desenvolver um EH com frequência de ressonância em torno de 60 Hz, maior densidade de potência líquida possível e ampla faixa de frequência de trabalho. Para modelar a potência de saída para os diferentes projetos de EH, um modelo numérico 3D é construído usando a multifísica COMSOL. Os resultados experimentais mostram boa concordância com os modelos numéricos, porém é possível observar que as restrições impostas pelo procedimento de fabricação são muito restritivas e o NPD é inferior ao desejado.

Palavras-chaves:

Energy harvest

MEMS

Piezoelétrico

Elementos finitos.

Abstract

Condition Based Monitoring (CBM) via vibration analysis is one of the most prevalent methods in maintenance nowadays. In this sense, wireless sensors have proven to be a powerful tool in CBM, allowing continuous measurements, easy installation, and data acquisition, as well as diminishing the risk of work related injuries. One of their limitations is the battery life-time of the sensor. This work presents the development of a piezoelectric Energy Harvester (EH) adapted for vibration monitoring sensors. Different designs are investigated and a MEMS piezoelectric EH is selected, modeled and optimized, using a differential evolution algorithm, following different objective functions with restrictions imposed by the multi-user batch process used to fabricate the prototypes. The optimization is targeted to develop an EH with resonance at 60 Hz, highest net power density as possible, and wide working frequency range. To model the output power given the different EH designs, a 3D numerical model is built using COMSOL multiphysics. Experimental results show good agreement with the numerical models, however it is possible to see that the restrictions imposed by the manufacturing procedure are too restrictive and the NPD is lower than desired.

Keywords:

Energy harvest

MEMS

Piezoelectric

FEM.

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